LAM 605-109114-004 Semiconductor Controller

LAM 605-109114-004 Semiconductor Controller

1、 Product positioning and functionality
central role
LAM 605-109114-004 is a high-performance controller designed specifically for semiconductor manufacturing equipment. Developed by LAM Research, it focuses on parameter control of key processes such as thin film deposition, chemical vapor deposition (CVD), and physical vapor deposition (PVD), ensuring automation, high precision, and stability in the semiconductor production process.
Key Function
Equipment control: Accurately regulate core parameters such as temperature, pressure, and flow rate to ensure consistency of process conditions.
Data collection and processing: Real time collection of equipment operation data, optimization of production processes through algorithms, and improvement of yield.
Fault detection and warning: Equipped with a built-in fault diagnosis system, it can identify equipment abnormalities in advance and avoid unplanned shutdowns.
Network communication: Supports multiple industrial protocols (such as Modbus, EtherCAT) to achieve remote monitoring and centralized management.

2、 Application scenarios
Thin film deposition process
CVD/PVD equipment: Control the flow rate of reaction gas, deposition temperature and time to ensure film uniformity (thickness deviation<1%).
Atomic Layer Deposition (ALD): Achieving single atomic layer precision in thin film growth through precise timing control.
The entire process of semiconductor manufacturing
Lithography machine matching: interlocked with the coating and developing modules to ensure that the thickness of the photoresist matches the exposure dose.
Etching equipment: Monitor plasma power and chamber pressure, control etching rate and selectivity.
Automated production line integration
As the core module of DCS/PLC system, it coordinates the synchronous operation of multiple devices (such as robotic arms and conveyor belts) to reduce manual intervention.
3、 Technical parameters
Parameter specifications
Input voltage 24 VDC ± 10%
Output current continuous 5 A, peak 10 A (3 seconds)
Control accuracy: Temperature ± 0.1 ℃, pressure ± 0.5% FS
Communication interface RS485/Ethernet (supporting Modbus TCP)
Working temperature: 0 ℃ to+55 ℃ (industrial grade)
Protection level IP20 (required to be used with a matching cabinet)

4、 User reviews and word-of-mouth
Advantage feedback
Strong stability: Operating continuously for more than 3 years without faults in 12 inch wafer fabs of manufacturers such as Samsung and TSMC.
High compatibility: Supports seamless integration with equipment from brands such as ASML and TEL, reducing integration costs.
Quick response: Fault warning delay<50 ms, meeting the stringent requirements of advanced processes (such as 3nm).
Potential Shortcomings
High price: The unit price is about 5000 US dollars, which is 2-3 times that of domestic controllers.
Technical closure: Programming software requires LAM authorization, making third-party maintenance difficult.

5、 Procurement and after-sales service
Procurement channels
Official agents: such as Xiamen Xiongba E-commerce Co., Ltd. (providing 1-year warranty and original factory certification).
Industrial e-commerce platforms such as Aiqicha and Global Plastic Network have suppliers who release product information, and their qualifications need to be verified.
Price range
Brand new equipment: Unit price ranging from approximately $5000 to $6888 (subject to purchasing volume and exchange rate fluctuations).
Used/refurbished equipment: The price is approximately $2000 to $3000, and the condition and functional integrity need to be confirmed.
after-sale service
Technical support: LAM official provides 7 × 24-hour remote assistance, with on-site service response time ≤ 4 hours.
Spare parts supply: Core spare parts (such as CPU modules, I/O boards) are in sufficient stock and can be shipped within 5 days for regular orders.
6、 Maintenance and troubleshooting
Daily maintenance
Cleaning: Clean the surface dust of the module with compressed air every quarter to avoid blockage of the heat dissipation holes.
Inspection: Check if the interface connection is loose every month and use a multimeter to test if the input/output voltage is normal.
Ventilation: Ensure that there is at least 10 cm of heat dissipation space around the module, and the ambient temperature is ≤ 45 ℃.
Common faults and solutions
Fault code E01 (communication interruption):
Reason: Damaged network cable, IP address conflict.
Solution: Replace the network cable and modify the IP address through the LAM configuration tool.
Output no action:
Reason: The interlock condition is not met and the output relay is damaged.
Solution: Check the interlock logic and replace the relay (model: LAM-605-RELAY-001).
Temperature over limit alarm:
Reason: Poor heat dissipation, sensor malfunction.
Solution: Clean the cooling fan, calibrate or replace the temperature sensor (PT100 type).

Main products, advantageous supply, sufficient inventory, if you need more, please contact me.
PLC and DCS system spare modules from world-renowned brands
Honeywell. Schneider.
Emerson EMERSON. XYCOM。
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WEStation system spare parts. Avis Triconex.
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ABB。 XYCOM。
Bently. GE General Electric. Yaskawa Yaskawa.
Bosch Rexroth Bosch Rexroth.
Yokogawa Yokogawa. Siemens.
Reliance。 Modicon.

Please contact Manager Luo for purchasing modules
Warranty： 365 days
Quality: Original module
Condition： New / Used
Warehouse: Spot
Delivery time: Shipped in 3 days after payment
WhatsApp:+86 18030183032
Mailbox： 3248602330@qq.com