mks AX8407 compact OZONE GENERATOR AX8407-09A

MKS AX8407-09A Compact Ozone Generator

The MKS AX8407-09A is a compact ozone generator that is part of the MKS Instruments product line. It converts pure oxygen into ozone through silent discharge technology, achieving high output and high concentration levels. This device only requires a small amount of nitrogen, far below the nitrogen level required by other ozone generators, resulting in low levels of pollutants.

Product Features
High ozone concentration and flow rate: The ozone concentration of AX8407-09A can reach 335 g/Nm ³ or 21.7 wt% (at 5 ° C), and the oxygen flow rate range is 5-40 slm, providing process flexibility.
Clean and safe alternative chemical treatment: Ozone has a high oxidation-reduction potential, can be generated on-site, and is easily converted into oxygen. It is a green chemical that is easy to convert into oxygen.
Low cost ownership: No consumables required, no chemical treatment costs needed.
Reliability testing: Reliability testing has exceeded 100000 hours and complies with CE, UL/CSA, and SEMI F47 standards.

technical specifications
Type: Ozone gas generator
Ozone output: up to 335 g/Nm ³
Flow rate: 5-40 slm
Intake: Oxygen: Grade 6 or better O2, Nitrogen: 100-1000 ppm Grade 5 or better N2
Control interface: Front panel control and remote operation
Cooling water temperature: 5-25 ° C (41-77 ° F)
Cooling water filtration: 100 microns
Cooling water quality: resistivity ≥ 50 K Ω/cm

application area
Semiconductor manufacturing: used for CVD and ALD film deposition, oxide growth, photoresist removal, etc.
Water treatment: used for water treatment, air treatment, and medical treatment.
Food industry: used for microbial inactivation and water treatment on food surfaces.

advantage
High purity ozone: Through improved design, AX8407-09A provides the highest purity ozone on the market.
Modular design: facilitates flexible configuration and integration into existing systems.
Security monitoring: equipped with security monitoring and status indication functions to ensure safe operation.
MKS AX8407-09A is a high-performance and highly reliable ozone generator suitable for various industrial applications, especially in the semiconductor manufacturing field that requires high-purity ozone.